JPH0336519Y2 - - Google Patents

Info

Publication number
JPH0336519Y2
JPH0336519Y2 JP13916588U JP13916588U JPH0336519Y2 JP H0336519 Y2 JPH0336519 Y2 JP H0336519Y2 JP 13916588 U JP13916588 U JP 13916588U JP 13916588 U JP13916588 U JP 13916588U JP H0336519 Y2 JPH0336519 Y2 JP H0336519Y2
Authority
JP
Japan
Prior art keywords
sublimate
hearth
peripheral wall
height
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13916588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0261956U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13916588U priority Critical patent/JPH0336519Y2/ja
Publication of JPH0261956U publication Critical patent/JPH0261956U/ja
Application granted granted Critical
Publication of JPH0336519Y2 publication Critical patent/JPH0336519Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13916588U 1988-10-27 1988-10-27 Expired JPH0336519Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13916588U JPH0336519Y2 (en]) 1988-10-27 1988-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13916588U JPH0336519Y2 (en]) 1988-10-27 1988-10-27

Publications (2)

Publication Number Publication Date
JPH0261956U JPH0261956U (en]) 1990-05-09
JPH0336519Y2 true JPH0336519Y2 (en]) 1991-08-02

Family

ID=31402169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13916588U Expired JPH0336519Y2 (en]) 1988-10-27 1988-10-27

Country Status (1)

Country Link
JP (1) JPH0336519Y2 (en])

Also Published As

Publication number Publication date
JPH0261956U (en]) 1990-05-09

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